Effects of speckle in Makyoh topography for the studies of extended defects
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چکیده
منابع مشابه
Makyoh Topography for the Study of Large-Area Extended Defects in Semiconductors
A quantitative approach to the Makyoh-topography image formation mechanism is presented. General relations are given on the optical settings; geometrical optical simulations of a sinusoidal surface and a hillock (or depression) are presented. Optimum working conditions are established, and general features of the imaging are pointed out. The experimental images taken for Si wafers are compared ...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2011
ISSN: 1742-6596
DOI: 10.1088/1742-6596/281/1/012006